About: http://webisa.webdatacommons.org/88026077

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph of the measured ellipsometric parameter psi and the calculated (theoretical) ellipsometric parameter psi of the sample silicon substrate overlaid with a silicon dioxide film layer and a titanium nitride film layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com