About: http://webisa.webdatacommons.org/90122458

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step 2 (mask formation), a mask having the designed circuit pattern is formed. [0097] In step 3 (wafer manufacture), a wafer (substrate) is manufactured by using a material such as silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com