About: http://webisa.webdatacommons.org/9629301

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A material such as silicon and silicon germanium is used as the amorphous semiconductor film 1503.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr