About: http://webisa.webdatacommons.org/98112214

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The intrinsic polysilicon layer is deposited by any suitable means, such as by CVD, to a thickness of approximately 100 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com