About: http://webisa.webdatacommons.org/98345412

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This insensitivity to misalignment is crucial for via resistance, especially as the via size shrinks to 0.25 ??m and below.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es