About: http://webisa.webdatacommons.org/100358085

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIELD OFTHE INVENTIONThe present invention relates generally to manufacturing semiconductor devices, particularly highly miniaturized semiconductor devices having ultra-shallow junction depths.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com