About: http://webisa.webdatacommons.org/400130022

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a plan view showing a pattern of contact spaces and slots formed during the iterative self-aligned contact metallization process according to the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr