About: chemical mechanical polishing cmp

Head noun: chemical
Postmodifier: mechanical polishing cmp

Same concepts

Broader concepts

label	provenance	confidence
polishing	isap:184618216	0.610758
conventional planarization process	isap:345771926	0.592174
process	isap:345771894	0.551826
planarizing step	isap:381392740	0.521256
planarization process	isap:345771893	0.443643
technique	isap:183118042	0.412521
art	isap:349399093	0.340072

Narrower concepts

label	provenance	confidence