About: planarization process

Premodifier: planarization
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence
process	isap:433845775	0.786772

Narrower concepts

label	provenance	confidence
cmp process	isap:433845506	0.699254
chemical mechanical polishing cmp	isap:345771893	0.443643
cmp	isap:233684181	0.436282
etchback	isap:342451877	0.396446