About: cmp process

Premodifier: cmp
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence
process	isap:433845452	0.731350
planarization process	isap:433845506	0.699254
substrate	isap:316110780	0.387272

Narrower concepts

label	provenance	confidence
semiconductor wafer	isap:229794449	0.435860
process	isap:433846210	0.224724