Toggle navigation
Faceted Browser
Sparql Endpoint
Browse using
OpenLink Faceted Browser
OpenLink Structured Data Editor
LodLive Browser
LODmilla Browser
Formats
RDF (Quad):
N-Quads
TriG
CSV
RDF (Triple):
N-Triples
N3/Turtle
JSON
XML
CSV
OData:
Atom
JSON
Microdata:
JSON
HTML
Embedded:
JSON
Turtle
About:
semiconductor wafer
Premodifier: semiconductorHead noun: wafer
Same concepts
http://dbpedia.org/resource/Wafer_(electronics)
Broader concepts
label
provenance
confidence
article
isap:
223293768
0.834863
semiconductor device
isap:
158466153
0.812652
item
isap:
195211565
0.808825
device
isap:
158466154
0.802669
component
isap:
339732202
0.798602
microelectronic substrate
isap:
337963181
0.789102
substrate assembly
isap:
296165529
0.780405
semiconductor workpiece
isap:
339165117
0.768282
fabrication process
isap:
229794448
0.766069
type of substrate
isap:
196922147
0.759891
semiconductor substrate
isap:
337963171
0.757395
semiconductor component
isap:
339732207
0.752668
brittle material
isap:
293552869
0.747175
object
isap:
155575900
0.746686
semiconductor product
isap:
230239413
0.746052
planar workpiece
isap:
339165120
0.744677
electronic substrate
isap:
337963185
0.744178
thin solid article
isap:
223293771
0.742109
silicon substrate
isap:
337963238
0.734572
work piece
isap:
369244608
0.731063
electronic device substrate
isap:
337963227
0.728771
electronic device
isap:
158466156
0.718678
semiconductor wafer
isap:
374378889
0.718033
flat media
isap:
373454312
0.717646
microelectronic workpiece
isap:
339165114
0.715598
microelectronic device
isap:
158466167
0.714012
disk-shaped workpiece
isap:
339165121
0.710624
microelectronic element
isap:
228601667
0.709358
base material
isap:
293552855
0.707048
suitable substrate
isap:
337963196
0.703640
thermal treatment of substrate
isap:
338133547
0.690466
part
isap:
195808176
0.690175
such substrate
isap:
337963215
0.676951
flat workpiece
isap:
339165116
0.673614
photosensitive substrate
isap:
337963183
0.664069
substrate
isap:
337963165
0.659836
application
isap:
208435031
0.657854
wafer-shaped article
isap:
223293780
0.657173
substrate processing system
isap:
164480692
0.647789
surface of substrate
isap:
223625129
0.640780
other material
isap:
293552862
0.636463
target
isap:
161603059
0.634291
substrate surface
isap:
223625140
0.630890
material
isap:
293552841
0.613014
various substrate
isap:
337963246
0.605242
sign inadvanced patent searchpatentsmethod
isap:
163835686
0.605104
substrate 14
isap:
337963206
0.605081
workpiece
isap:
339165112
0.602472
thin disk
isap:
195511857
0.597374
manipulation of multiple object
isap:
427835568
0.595783
glass substrate
isap:
337963304
0.591686
semiconductor chip
isap:
195473593
0.580647
product
isap:
230239411
0.570654
plasma processing apparatus
isap:
335647347
0.567828
structure
isap:
336793957
0.565901
sample
isap:
163703373
0.565777
surface of object
isap:
223625143
0.565590
other substrate
isap:
337963268
0.542957
wafer
isap:
374378886
0.537041
integrate circuit
isap:
231205600
0.530280
uspto assignment
isap:
257987190
0.528407
element
isap:
228601665
0.525326
processing of wafer
isap:
258791486
0.521331
present invention
isap:
338986944
0.515038
substrate 2
isap:
337963235
0.510642
fig 1
isap:
326439987
0.501138
variety of substrate
isap:
228823999
0.500800
oxide layer
isap:
369260582
0.493718
polished workpiece
isap:
339165136
0.490801
surface of a substrate
isap:
223625120
0.489777
cleaning
isap:
296224504
0.478039
substance
isap:
339493249
0.477922
step
isap:
197020775
0.469709
improved method
isap:
153635537
0.467528
circuit
isap:
231205598
0.460856
slice of semiconductor material
isap:
366213137
0.451573
disk-shaped substrate
isap:
337963296
0.451474
wafer-shaped object
isap:
155575905
0.445941
surface of a workpiece
isap:
223625123
0.437287
cmp process
isap:
229794449
0.435860
surface of a object
isap:
223625122
0.433985
surface
isap:
223625121
0.432366
specimen
isap:
295477790
0.410053
embodiment
isap:
259696460
0.407692
container
isap:
339138806
0.407176
polished
isap:
295901331
0.365413
cmp
isap:
326468211
0.364380
coating
isap:
225965493
0.364284
like
isap:
196177226
0.356798
layer
isap:
369260572
0.352332
method
isap:
153635529
0.350920
process
isap:
229794447
0.330729
semiconductor
isap:
96597786
0.321848
example
isap:
226254743
0.310841
however
isap:
230951280
0.306612
treatment
isap:
338133546
0.294891
defect
isap:
158574444
0.293690
result
isap:
153445760
0.287896
particle
isap:
297187510
0.284725
apparatus
isap:
335647340
0.276237
system
isap:
164480690
0.272554
problem
isap:
229732449
0.261794
inspection
isap:
260942413
0.246725
number
isap:
161456795
0.224121
sample 1
isap:
163703383
0.201890
machine
isap:
228029466
0.200795
invention
isap:
338986947
0.191818
use
isap:
326408371
0.186090
Narrower concepts
label
provenance
confidence
gallium arsenide wafer
isap:
374378890
0.795248
gallium arsenide
isap:
360284540
0.725663
semiconductor wafer
isap:
374378889
0.718033
chemical vapor deposition
isap:
475523485
0.713217
integrate circuit
isap:
32732506
0.695009
silicon wafer
isap:
374378884
0.673140
preferred embodiment
isap:
474859474
0.665072
glass substrate
isap:
15880886
0.647195
first substrate
isap:
15880875
0.608176
second substrate
isap:
15880889
0.607074
silicon
isap:
38143158
0.574177
adhesive film
isap:
88901093
0.537869
wafer 21
isap:
374378963
0.505244
silicon substrate
isap:
15880930
0.496187
substrate 10
isap:
15880921
0.466955
wafer
isap:
374378887
0.440001
ic
isap:
464072385
0.434329
microprocessor
isap:
131205850
0.403395
transistor
isap:
474346997
0.398404
gaa
isap:
469788777
0.393036
fig 1
isap:
469959691
0.392459
circuit
isap:
32732508
0.383230
water
isap:
371285737
0.374526
microchip
isap:
15045548
0.373984
example
isap:
37483073
0.368774
si
isap:
464038313
0.355023
surface of the wafer
isap:
35291317
0.350141
array
isap:
367224124
0.332503
surface
isap:
35291314
0.328885
particle
isap:
363460972
0.318048
structure
isap:
14265600
0.317033
reticle
isap:
36989151
0.298724
like
isap:
89489593
0.283663
mm
isap:
463909014
0.274620
material
isap:
363764656
0.262574
plurality
isap:
14825375
0.254995
fig 3
isap:
469959696
0.235951
substrate
isap:
15880852
0.233065
film
isap:
88901092
0.220451
device
isap:
121922257
0.200617
workpiece
isap:
17324576
0.186255
laser
isap:
365546219
0.184470
lcd
isap:
465647682
0.181118
case
isap:
96207829
0.172807
carrier
isap:
40422424
0.164876
etching
isap:
34460054
0.161778
method
isap:
118826137
0.153267
nitrogen
isap:
363156418
0.135929
invention
isap:
14025648
0.128722
apparatus
isap:
14766762
0.106385