Head noun: reticle
| Same concepts |
|---|
| http://dbpedia.org/resource/Reticle |
Broader concepts
| label | provenance | confidence |
|---|---|---|
| mask | isap:75798510 | 0.422609 |
| item | isap:75703588 | 0.400909 |
| first object | isap:267888181 | 0.368408 |
| device | isap:271116404 | 0.367930 |
| substrate | isap:319320355 | 0.316645 |
| specimen | isap:45500290 | 0.299490 |
| semiconductor wafer | isap:36989151 | 0.298724 |
| feature | isap:432137181 | 0.274123 |
| other substrate | isap:319320357 | 0.273330 |
| error in lithography | isap:40842886 | 0.265332 |
| problem | isap:431778118 | 0.248284 |
| circle dot | isap:509494115 | 0.246441 |
| thing | isap:33857161 | 0.216804 |
| circuit pattern | isap:433494248 | 0.212593 |
| material | isap:44711211 | 0.211375 |
| apparatus | isap:320826205 | 0.206887 |
| moa | isap:509439592 | 0.206403 |
| post | isap:80699034 | 0.196862 |
| object | isap:267888182 | 0.190836 |
| surface | isap:430980159 | 0.186156 |
| photomask | isap:318755522 | 0.184418 |
| pattern | isap:433494247 | 0.181647 |
| plate | isap:33296331 | 0.181405 |
| combination | isap:64905923 | 0.180506 |
| reticle | isap:431745572 | 0.141437 |
| gun | isap:509501265 | 0.131070 |
| guy | isap:509501259 | 0.118227 |
| tad | isap:509451926 | 0.117265 |
| method | isap:270881654 | 0.116797 |
| present invention | isap:320338355 | 0.116604 |
| scope | isap:36430810 | 0.114686 |
| however | isap:432827732 | 0.046147 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| phase shift reticle | isap:225195062 | 0.250058 |
| fig 9 | isap:236559831 | 0.188934 |
| fig 5 | isap:236559832 | 0.172932 |
| t | isap:299204436 | 0.145173 |
| pattern | isap:437898558 | 0.145030 |
| system | isap:447869665 | 0.142902 |
| reticle | isap:431745572 | 0.141437 |
| mil-dot | isap:435696117 | 0.124116 |
| method | isap:443797139 | 0.108639 |
| photomask | isap:23800964 | 0.106447 |
| apparatus | isap:25820418 | 0.094784 |
| target | isap:439879712 | 0.087246 |
| wafer | isap:229723088 | 0.074402 |
| scope | isap:221512502 | 0.068847 |
| mil | isap:234183451 | 0.045631 |