Head noun: reticle
Same concepts |
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http://dbpedia.org/resource/Reticle |
Broader concepts
label | provenance | confidence |
---|---|---|
mask | isap:75798510 | 0.422609 |
item | isap:75703588 | 0.400909 |
first object | isap:267888181 | 0.368408 |
device | isap:271116404 | 0.367930 |
substrate | isap:319320355 | 0.316645 |
specimen | isap:45500290 | 0.299490 |
semiconductor wafer | isap:36989151 | 0.298724 |
feature | isap:432137181 | 0.274123 |
other substrate | isap:319320357 | 0.273330 |
error in lithography | isap:40842886 | 0.265332 |
problem | isap:431778118 | 0.248284 |
circle dot | isap:509494115 | 0.246441 |
thing | isap:33857161 | 0.216804 |
circuit pattern | isap:433494248 | 0.212593 |
material | isap:44711211 | 0.211375 |
apparatus | isap:320826205 | 0.206887 |
moa | isap:509439592 | 0.206403 |
post | isap:80699034 | 0.196862 |
object | isap:267888182 | 0.190836 |
surface | isap:430980159 | 0.186156 |
photomask | isap:318755522 | 0.184418 |
pattern | isap:433494247 | 0.181647 |
plate | isap:33296331 | 0.181405 |
combination | isap:64905923 | 0.180506 |
reticle | isap:431745572 | 0.141437 |
gun | isap:509501265 | 0.131070 |
guy | isap:509501259 | 0.118227 |
tad | isap:509451926 | 0.117265 |
method | isap:270881654 | 0.116797 |
present invention | isap:320338355 | 0.116604 |
scope | isap:36430810 | 0.114686 |
however | isap:432827732 | 0.046147 |
Narrower concepts
label | provenance | confidence |
---|---|---|
phase shift reticle | isap:225195062 | 0.250058 |
fig 9 | isap:236559831 | 0.188934 |
fig 5 | isap:236559832 | 0.172932 |
t | isap:299204436 | 0.145173 |
pattern | isap:437898558 | 0.145030 |
system | isap:447869665 | 0.142902 |
reticle | isap:431745572 | 0.141437 |
mil-dot | isap:435696117 | 0.124116 |
method | isap:443797139 | 0.108639 |
photomask | isap:23800964 | 0.106447 |
apparatus | isap:25820418 | 0.094784 |
target | isap:439879712 | 0.087246 |
wafer | isap:229723088 | 0.074402 |
scope | isap:221512502 | 0.068847 |
mil | isap:234183451 | 0.045631 |