Premodifier: substrateHead noun: surface
Same concepts |
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Broader concepts
label | provenance | confidence |
---|---|---|
surface | isap:438543609 | 0.647996 |
substrate surface | isap:438543633 | 0.618192 |
substrate | isap:318206967 | 0.605476 |
method | isap:274018464 | 0.520742 |
material | isap:44657088 | 0.488618 |
plane | isap:36028664 | 0.429383 |
layer | isap:35985468 | 0.425386 |
factor | isap:276031753 | 0.401517 |
direction | isap:316048442 | 0.308810 |
problem | isap:435625882 | 0.298120 |
nanostructure | isap:145723428 | 0.282340 |
Narrower concepts
label | provenance | confidence |
---|---|---|
semiconductor wafer | isap:223625140 | 0.630890 |
present invention | isap:27163297 | 0.622458 |
substrate surface | isap:438543633 | 0.618192 |
electrode | isap:26421188 | 0.438936 |
metal | isap:224476633 | 0.411540 |
wall | isap:3435286 | 0.385926 |
layer | isap:224555734 | 0.334906 |
surface | isap:438543577 | 0.313346 |
portion | isap:435750002 | 0.294200 |
area | isap:3495724 | 0.293607 |
glass | isap:228297403 | 0.289715 |
oxide | isap:231134226 | 0.245864 |
process | isap:437016423 | 0.229932 |
material | isap:343010157 | 0.212602 |
c | isap:299107002 | 0.211654 |
region | isap:448528897 | 0.175503 |