Head noun: substratePostmodifier: 14
Same concepts |
---|
Broader concepts
label | provenance | confidence |
---|---|---|
surface | isap:26400684 | 0.239046 |
Narrower concepts
label | provenance | confidence |
---|---|---|
semiconductor wafer | isap:337963206 | 0.605081 |
silicon | isap:319385365 | 0.281080 |