Premodifier: substrate processingHead noun: system
Same concepts |
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Broader concepts
label | provenance | confidence |
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Narrower concepts
label | provenance | confidence |
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semiconductor wafer | isap:164480692 | 0.647789 |
substrate processing apparatus | isap:135538782 | 0.599446 |
process chamber | isap:268722399 | 0.554941 |