About: process chamber

Premodifier: process
Head noun: chamber

Same concepts

Broader concepts

label	provenance	confidence
process chamber	isap:431052974	0.838293
semiconductor substrate	isap:320585856	0.721370
chamber	isap:431053022	0.568328
substrate processing system	isap:268722399	0.554941
equipment	isap:316932492	0.503481
device	isap:269521433	0.396638
example	isap:437830735	0.343033
tool	isap:74019725	0.271010
embodiment	isap:244541240	0.270481

Narrower concepts

label	provenance	confidence
process chamber	isap:431052974	0.838293
chamber	isap:431053247	0.358607
substrate	isap:25689841	0.322887