About: substrate processing apparatus

Premodifier: substrate processing
Head noun: apparatus

Same concepts

Broader concepts

label	provenance	confidence
substrate processing system	isap:135538782	0.599446
substrate processing apparatus	isap:352555094	0.568684
substrate processing method	isap:134443615	0.476807
system	isap:135538893	0.417707
method	isap:134443618	0.223384

Narrower concepts

label	provenance	confidence
semiconductor wafer processing apparatus	isap:352555511	0.751872
substrate processing	isap:192091655	0.633895
substrate processing apparatus	isap:352555094	0.568684
maintenance method	isap:421373737	0.518744
storage medium	isap:421029652	0.489801
apparatus	isap:352555487	0.399666
substrate processing method	isap:421373554	0.365893