About: substrate processing method

Premodifier: substrate processing
Head noun: method

Same concepts

Broader concepts

label	provenance	confidence
substrate processing method	isap:387627814	0.415340
substrate processing apparatus	isap:421373554	0.365893

Narrower concepts

label	provenance	confidence
substrate processing apparatus	isap:134443615	0.476807
substrate processing method	isap:387627814	0.415340