Premodifier: fabrication
Head noun: process

Same concepts
http://dbpedia.org/resource/Semiconductor_device_fabrication

Broader concepts

labelprovenanceconfidence
processisap:4338454530.768503
factorisap:2699786910.390720
substrateisap:3161107810.382971
exampleisap:4328409660.260015
present inventionisap:3175067370.214148
materialisap:460995410.201654