About: photolithography

Head noun: photolithography

Same concepts
http://dbpedia.org/resource/Photolithography

Broader concepts

label	provenance	confidence
technique	isap:263647429	0.720235
process	isap:235167243	0.706329
method	isap:210832908	0.691099
conventional semiconductor fabrication technique	isap:263647450	0.637696
microfabrication technique	isap:263647433	0.628265
conventional microfabrication technique	isap:263647464	0.593789
lithographic technique	isap:263647434	0.582895
conventional ic processing step	isap:250785305	0.578489
lithographic process	isap:235167246	0.578440
semiconductor fabrication process	isap:235167253	0.577266
suitable technique	isap:263647440	0.576725
conventional technique	isap:263647430	0.574569
semiconductor processing method	isap:210832915	0.573148
semiconductor processing technique	isap:263647456	0.564623
semiconductor manufacturing process	isap:235167247	0.563454
patterning process	isap:235167245	0.559132
suitable method	isap:210832910	0.557774
printing technique	isap:263647438	0.549946
known method	isap:210832909	0.547696
standard patterning technique	isap:263647455	0.530573
known technique	isap:263647431	0.516425
various technique	isap:263647443	0.497233
conventional method	isap:210832913	0.496140
suitable means	isap:469676115	0.495494
suitable process	isap:235167252	0.493338
technology	isap:238022467	0.478482
semiconductor processing	isap:238817657	0.466829
fabrication process	isap:235167244	0.466599
other method	isap:210832911	0.463680
various step	isap:250785309	0.461994
advance in specific semiconductor	isap:232062873	0.458339
appropriate technique	isap:263647470	0.451246
series of process	isap:212030402	0.447117
variety of process	isap:237028038	0.438725
patterning technique	isap:263647437	0.435857
complicated process	isap:235167254	0.435071
complicated multi-step process	isap:235167255	0.431770
integrate circuit fabrication	isap:111752592	0.412663
variety of method	isap:237028037	0.411878
patterning method	isap:210832914	0.408911
lithographic method	isap:210832912	0.408448
fabrication technique	isap:263647448	0.403654
patterning approach	isap:332115015	0.402411
conventional manner	isap:210891815	0.401609
common method	isap:210832922	0.394007
known process	isap:235167251	0.392190
subsequent processing	isap:238817659	0.388956
expensive process	isap:235167248	0.362809
complex process	isap:235167259	0.359179
application	isap:111830055	0.313665
topic	isap:469843991	0.311430
fabrication	isap:111752591	0.311034
pattern definition	isap:237464133	0.303035
step	isap:250785304	0.299676
art	isap:281610058	0.290381
patterning	isap:237525634	0.283895
conventional means	isap:469676114	0.283622
means	isap:469676113	0.279023
production process	isap:235167260	0.268910
processing	isap:238817656	0.265931
manufacturing process	isap:235167257	0.262966
lithography	isap:111524387	0.251014
patterned	isap:261554106	0.242042
example	isap:235557851	0.235230
tool	isap:250142857	0.231545
furthermore	isap:111991012	0.215012
complex	isap:232663931	0.213847
surface	isap:235318124	0.172448
however	isap:233076012	0.160234
manufacturing	isap:278392992	0.156616
a	isap:264870385	0.116892
operation	isap:262819811	0.113806

Narrower concepts

label	provenance	confidence
photoresist	isap:501727557	0.262571
photomask	isap:486942515	0.188514
process	isap:508417640	0.165761
apparatus	isap:486471150	0.137397
method	isap:402703500	0.072142