Premodifier: patterningHead noun: method
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| patterning method | isap:387628166 | 0.458218 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| lithography | isap:142479645 | 0.459561 |
| patterning method | isap:387628166 | 0.458218 |
| photolithography | isap:210832914 | 0.408911 |