Premodifier: variousHead noun: step
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| step | isap:167755761 | 0.475037 |
| photolithography | isap:250785309 | 0.461994 |
| deposition | isap:505665288 | 0.433856 |
| order | isap:196956055 | 0.329735 |
| user | isap:173914700 | 0.189343 |