About: patterning process

Premodifier: patterning
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence

Narrower concepts

label	provenance	confidence
photolithography process	isap:433846295	0.811126
lithography process	isap:433846361	0.730466
photolithography	isap:235167245	0.559132
lithography	isap:138762057	0.489562
process	isap:433845597	0.434699
etching	isap:438669809	0.401678
lift-off	isap:342736876	0.385518