About: photolithography process

Premodifier: photolithography
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence
patterning process	isap:433846295	0.811126
process	isap:433845552	0.668918

Narrower concepts

label	provenance	confidence
exposure	isap:345889091	0.460996
masking	isap:431731774	0.347844
photoresist	isap:138364933	0.228888