Premodifier: semiconductor
Head noun: processing
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| application | isap:315492990 | 0.850233 |
| field | isap:475057078 | 0.794299 |
| industrial application | isap:315493022 | 0.744168 |
| variety of application | isap:220702451 | 0.626219 |
| industry | isap:284436805 | 0.609888 |
| process | isap:218235849 | 0.574941 |
| area | isap:503207596 | 0.411545 |
| number | isap:253904237 | 0.343888 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| photolithography | isap:238817657 | 0.466829 |
| etching | isap:244963854 | 0.427833 |
| silicon | isap:242793806 | 0.285241 |
| exposure | isap:181570919 | 0.237513 |
| machine | isap:243910772 | 0.192949 |
| apparatus | isap:43329672 | 0.159253 |
| system | isap:18496941 | 0.146757 |
| method | isap:20845496 | 0.146728 |