Premodifier: lithographicHead noun: process
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| process | isap:433845535 | 0.666236 |
| feature size | isap:74007709 | 0.651791 |
| material | isap:46099565 | 0.251260 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| photolithography | isap:235167246 | 0.578440 |
| light reflection | isap:216869046 | 0.448443 |
| numerical aperture na | isap:29831505 | 0.428019 |