Premodifier: lithographicHead noun: process
Same concepts |
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Broader concepts
label | provenance | confidence |
---|---|---|
process | isap:433845535 | 0.666236 |
feature size | isap:74007709 | 0.651791 |
material | isap:46099565 | 0.251260 |
Narrower concepts
label | provenance | confidence |
---|---|---|
photolithography | isap:235167246 | 0.578440 |
light reflection | isap:216869046 | 0.448443 |
numerical aperture na | isap:29831505 | 0.428019 |