Premodifier: lithographic
Head noun: process

Same concepts

Broader concepts

labelprovenanceconfidence
processisap:4338455350.666236
feature sizeisap:740077090.651791
materialisap:460995650.251260

Narrower concepts

labelprovenanceconfidence
photolithographyisap:2351672460.578440
light reflectionisap:2168690460.448443
numerical aperture naisap:298315050.428019