About: semiconductor fabrication process

Premodifier: semiconductor fabrication
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence

Narrower concepts

label	provenance	confidence
chemical vapor deposition cvd	isap:235951262	0.752725
photolithography	isap:235167253	0.577266
etching	isap:438669749	0.565705
process	isap:433845648	0.512134
lithography	isap:138762049	0.451802