WebIsALOD: plasma etching

Premodifier: plasma
Head noun: etching

Same concepts
http://dbpedia.org/resource/Plasma_etching

Broader concepts

label	provenance	confidence
etching process	isap:438669747	0.846058
plasma process	isap:438669778	0.810027
technique	isap:318270236	0.807180
known etching technique	isap:318270346	0.792780
process	isap:438669734	0.757038
other method	isap:267663022	0.735771
etching technique	isap:318270279	0.725919
method	isap:267662975	0.722836
other technique	isap:318270278	0.712909
plasma processing	isap:244963851	0.708346
fabrication process	isap:438669859	0.696431
etch process	isap:438669786	0.695709
chemical etching	isap:429460400	0.693451
suitable process	isap:438669764	0.689367
suitable method	isap:267663001	0.682230
dry etching method	isap:267662993	0.675003
etching	isap:429460386	0.648349
semiconductor manufacturing process	isap:438669827	0.638775
limited to	isap:56209833	0.620711
plasma etching	isap:429460411	0.609142
suitable technique	isap:318270258	0.596960
dry etching	isap:429460382	0.585354
means	isap:33742481	0.538981
standard	isap:45794625	0.516710
variety of way	isap:435620803	0.510696
step	isap:76529248	0.475646
art	isap:509896278	0.471116
wafer	isap:34460055	0.449837
technology	isap:245759718	0.442046
furthermore	isap:64548837	0.441624
dry	isap:509915009	0.373032

Narrower concepts

About: plasma etching