About: plasma processing

Premodifier: plasma
Head noun: processing

Same concepts
http://dbpedia.org/resource/Plasma_processing

Broader concepts

label	provenance	confidence
application	isap:315493070	0.753771
method	isap:256153397	0.636690
processing	isap:399873154	0.521685
technique	isap:192013143	0.429944

Narrower concepts

label	provenance	confidence
plasma etching	isap:244963851	0.708346
plasma cvd	isap:238522436	0.430578