Premodifier: dry etchingHead noun: method
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| etching method | isap:387628750 | 0.459488 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| rie method | isap:387628019 | 0.758084 |
| reactive ion etching | isap:267662995 | 0.719535 |
| plasma etching | isap:267662993 | 0.675003 |
| rie reactive ion etching | isap:215086909 | 0.543583 |