Premodifier: etchingHead noun: method
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| method | isap:387627958 | 0.600407 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| wet etching | isap:267663042 | 0.724348 |
| reactive ion | isap:212931001 | 0.658547 |
| dry etching | isap:267663002 | 0.619131 |
| dry etching method | isap:387628750 | 0.459488 |
| etching | isap:267663054 | 0.315907 |
| cde | isap:209396211 | 0.290780 |
| cf4 | isap:213645636 | 0.245912 |
| method | isap:387628103 | 0.150397 |