Premodifier: reactiveHead noun: ion
| Same concepts | 
|---|
Broader concepts
| label | provenance | confidence | 
|---|---|---|
| suitable process | isap:235674169 | 0.691567 | 
| etching method | isap:212931001 | 0.658547 | 
| etch process | isap:235674166 | 0.656675 | 
| method | isap:212931002 | 0.443607 | 
| technique | isap:261846264 | 0.441563 | 
| process | isap:235674164 | 0.428506 | 
| layer | isap:468597842 | 0.407115 | 
Narrower concepts
| label | provenance | confidence | 
|---|