About: etch process

Premodifier: etch
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence
etch process	isap:433845751	0.853318
suitable process	isap:433846697	0.755282
isotropic etch	isap:72336238	0.642136
process	isap:433845778	0.542455

Narrower concepts

label	provenance	confidence
etch process	isap:433845751	0.853318
anisotropic dry etch process	isap:433845966	0.796620
wet etch	isap:8640874	0.786063
rie process	isap:433846073	0.742426
plasma etching	isap:438669786	0.695709
reactive ion	isap:235674166	0.656675
silicon	isap:431875120	0.485325
cf4	isap:232065197	0.377000
embodiment	isap:217895862	0.305824