About: cf4

Head noun: cf4

Same concepts
http://dbpedia.org/resource/Tetrafluoromethane

Broader concepts

label	provenance	confidence
halogenate hydrocarbon	isap:111630527	0.424950
fluorine source gas	isap:282241187	0.410295
etch gas	isap:282241179	0.392348
process gas	isap:282241186	0.385045
etchant gas	isap:282241183	0.383030
fluorine-based gas	isap:282241173	0.380843
gas mixture	isap:234619702	0.378688
etch process	isap:232065197	0.377000
etch chemistry	isap:262869514	0.371107
etching gas	isap:282241174	0.361734
fluorinate gas	isap:282241178	0.352171
compound contain fluorine	isap:332239209	0.334936
fluorine-containing gas	isap:282241176	0.330001
fluorocarbon gas	isap:282241177	0.272684
reactive gas	isap:282241175	0.268679
gas	isap:282241172	0.262153
pfc gas	isap:282241192	0.253114
good option	isap:212316432	0.251909
etching method	isap:213645636	0.245912
chemistry	isap:262869513	0.225547
fluorocarbon	isap:241549850	0.206867
perfluorocarbon	isap:416030899	0.195101
etching reagent	isap:234638517	0.192823
plasma	isap:214536404	0.190685
further	isap:233651662	0.182049
sf6	isap:282247181	0.174338
chlorine	isap:329305553	0.171478
process	isap:232065198	0.167032
impurity	isap:329704060	0.163132
reactant gas	isap:282241197	0.154250
case	isap:249193857	0.146089
pfc	isap:282259324	0.135642
fluorine	isap:331769121	0.134603
nature	isap:212090142	0.130219
example	isap:233424032	0.126858
compound	isap:332239206	0.101645

Narrower concepts

label	provenance	confidence