Premodifier: etchingHead noun: gas
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| gas | isap:281611106 | 0.576831 |
| processing gas | isap:281611436 | 0.556038 |
| etchant | isap:235171826 | 0.391770 |
| process | isap:235983235 | 0.341134 |
| ar | isap:416131832 | 0.221011 |
| cl2 | isap:281600209 | 0.208634 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| sf6 gas | isap:281611384 | 0.752480 |
| h2 gas | isap:281611437 | 0.749446 |
| oxygen gas | isap:281611312 | 0.565358 |
| carbon | isap:404695685 | 0.417221 |
| chlorine | isap:350092989 | 0.412727 |
| oxygen | isap:403626020 | 0.395699 |
| gas | isap:281611101 | 0.385057 |
| chf3 | isap:126277550 | 0.370252 |
| halogen | isap:510018403 | 0.364457 |
| cf4 | isap:282241174 | 0.361734 |
| n2 | isap:187164255 | 0.358674 |
| sf6 | isap:279371905 | 0.316172 |