Head noun: sf6
| Same concepts |
|---|
| http://dbpedia.org/resource/Sulfur_hexafluoride |
Broader concepts
| label | provenance | confidence |
|---|---|---|
| fluorine compound | isap:331757968 | 0.412038 |
| fluorinate gas | isap:279371901 | 0.383821 |
| plasma etching | isap:233571408 | 0.356728 |
| inert gas | isap:279371897 | 0.351887 |
| gas | isap:279371895 | 0.337892 |
| etching gas | isap:279371905 | 0.316172 |
| fluorinate chemistry | isap:262766983 | 0.313215 |
| electro-negative gas | isap:279371904 | 0.310607 |
| electronegative gas | isap:279371899 | 0.295738 |
| circuit breaker | isap:232398739 | 0.290999 |
| ion etch rie | isap:279356452 | 0.264924 |
| fluorine-containing gas | isap:279371898 | 0.256375 |
| ghg | isap:279371175 | 0.255486 |
| compound | isap:331757967 | 0.254097 |
| fluorine atom | isap:247860582 | 0.199295 |
| species | isap:233320736 | 0.198751 |
| greenhouse gas | isap:279371896 | 0.183805 |
| tracer | isap:214917393 | 0.181510 |
| molecule | isap:332013080 | 0.176791 |
| fluid | isap:467407562 | 0.140160 |
| plasma | isap:214202835 | 0.120133 |
| type | isap:246374806 | 0.089314 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| cf4 | isap:282247181 | 0.174338 |
| etchant | isap:508020406 | 0.092169 |