About: process gas

Premodifier: process
Head noun: gas

Same concepts

Broader concepts

label	provenance	confidence
inert gas	isap:281611112	0.773553
process parameter	isap:263676790	0.724123
mixed gas	isap:281611322	0.657991
process condition	isap:264105018	0.651741
gas	isap:281611032	0.620665
process gas	isap:281611217	0.480005

Narrower concepts

label	provenance	confidence
reactive gas for etching	isap:281611289	0.855562
carrier gas	isap:281611287	0.759578
oxygen o2	isap:187616460	0.696422
carbon dioxide	isap:511349627	0.651859
nitrogen n2	isap:187164215	0.601414
ammonia nh3	isap:279485910	0.577984
hydrogen h2	isap:187458651	0.560034
silane	isap:403404724	0.521465
gas	isap:281611078	0.496541
process gas	isap:281611217	0.480005
nitrogen	isap:350032523	0.459141
ammonia	isap:508071088	0.454206
carbon monoxide	isap:350467925	0.428393
fluorine	isap:350633607	0.415810
co2	isap:279588504	0.409509
etchant	isap:508031565	0.407514
bcl3	isap:128905047	0.406724
cf4	isap:282241186	0.385045
n2	isap:187164219	0.381583
argon	isap:324463281	0.376054
h2	isap:187458662	0.375809
teo	isap:281697779	0.375376
nh3	isap:279485900	0.372750
metal	isap:324761053	0.364371
air	isap:281379600	0.323834
hydrogen	isap:349522599	0.312172
o2	isap:187616453	0.299199
oxygen	isap:403625965	0.290288
sih4	isap:125053217	0.272761
case	isap:127781706	0.205280