Premodifier: process
Head noun: parameter

Same concepts
http://dbpedia.org/resource/Process_variable

Narrower concepts

labelprovenanceconfidence
gas pressureisap:1837758220.888894
gas flow rateisap:2858474310.841924
flow rateisap:2858474080.839612
chamber pressureisap:1837757650.819148
oxide thicknessisap:3522379790.804837
concentrationisap:221367360.799961
temperatureisap:2775763640.798842
reaction temperatureisap:2775765130.752680
temperature profileisap:3179517210.750286
exposure timeisap:2896463730.748008
overlay registrationisap:1124818730.745857
substrate temperatureisap:2775764080.741163
electrode gapisap:2635476540.736255
laser powerisap:3395401070.731050
process gasisap:2636767900.724123
rf powerisap:3395401160.722776
air flowisap:2894986090.721834
reactor pressureisap:1837757990.717454
contact timeisap:2896465030.714914
ph valueisap:3361259950.706586
hydraulic retention time hrtisap:2641321470.703025
mole ratioisap:3370629170.698638
process variableisap:1863423060.692691
apply pressureisap:1837758030.690388
phisap:978220360.683727
ion fluxisap:2859733590.680846
rf power levelisap:3350691390.668983
current densityisap:3187370000.662631
process temperatureisap:2775764940.650055
relative humidityisap:1858165500.649394
timeisap:2896463450.644142
annealing temperatureisap:2775768510.626256
plasma energyisap:4204079720.615147
temperature of the substrateisap:2775767570.610477
gas flowisap:2894986030.588729
electric fieldisap:3352359510.587104
gas compositionisap:2771735490.576265
compositionisap:2771735610.568176
numberisap:4218766720.563424
deposition rateisap:2858475050.552724
durationisap:1855894360.514406
powerisap:3395401140.502287
typeisap:2885335200.488390
depth of cutisap:3355002480.456221
pressureisap:1837756690.450489
purityisap:4233014490.447986
chemistryisap:3524934300.431720
profileisap:3179517290.430617
velocityisap:1850000400.427355
thicknessisap:3522379670.426765
substrateisap:3531337450.417512
dimensionisap:3517834400.414470
depthisap:3355002400.410862
airisap:2625278570.410466
forceisap:3373547450.409588
densityisap:3187369560.400263
lengthisap:4201822950.400089
speedisap:3384149980.395658
sizeisap:2861816730.390571
conditionisap:3521280020.390061
volumeisap:4255415850.370489
levelisap:3350689390.364368
focusisap:3356851550.359676
feedisap:2898910370.340196
filmisap:2886033630.335987
flowisap:2894986260.334321
likeisap:2901380470.295857
embodimentisap:1921218760.293252
processisap:3166863990.273419
valveisap:3372737680.255554
dcisap:981074290.254025
methodisap:4232156620.228422
gasisap:2636767750.199686