About: dry etching

Premodifier: dry
Head noun: etching

Same concepts
http://dbpedia.org/resource/Dry_etching

Broader concepts

label	provenance	confidence
method	isap:267662974	0.894623
technique	isap:318270244	0.838019
suitable etching technique	isap:318270314	0.772146
suitable etching process	isap:438669803	0.756741
etching technique	isap:318270318	0.738798
suitable technique	isap:318270299	0.695976
known technique	isap:318270287	0.683162
suitable process	isap:438669799	0.678295
known method	isap:267662998	0.672040
etching process	isap:438669757	0.657486
known process	isap:438669800	0.643071
etching method	isap:267663002	0.619131
process	isap:438669741	0.610626
processing step	isap:76529257	0.589821
variety of technique	isap:435620796	0.588912
advance in specific semiconductor	isap:436083408	0.568599
step	isap:76529242	0.472740
etching	isap:429460384	0.463355
example	isap:434717711	0.440772

Narrower concepts

label	provenance	confidence
reactive ion etch rie	isap:233957238	0.856579
reactive ion etching	isap:429460381	0.691030
plasma etching	isap:429460382	0.585354
etching	isap:429460389	0.365956
rie	isap:233996201	0.250824
selectivity	isap:138422421	0.231937
icp	isap:235209188	0.177094
process	isap:436788705	0.090344