About: reactive ion etching

Premodifier: reactive ion
Head noun: etching

Same concepts
http://dbpedia.org/resource/Reactive-ion_etching

Broader concepts

label	provenance	confidence
anisotropic etching technique	isap:318270238	0.876034
suitable anisotropic etching technique	isap:318270348	0.827567
suitable means	isap:33742486	0.759773
means	isap:33742480	0.733955
suitable technique	isap:318270272	0.728842
dry etching method	isap:267662995	0.719535
dry etching	isap:429460381	0.691030
plasma etching	isap:429460394	0.690390
method	isap:267662978	0.682099
etching technique	isap:318270253	0.667093
anisotropic etch	isap:77427235	0.666227
technique	isap:318270235	0.660931
appropriate process	isap:438669762	0.626004
dry process	isap:438669775	0.610393
dry etch process	isap:438669753	0.592113
process	isap:438669738	0.570318
treatment	isap:316846291	0.482816
art	isap:509896287	0.475518
etching	isap:429460387	0.459296
dry etch	isap:77427236	0.456743
procedure	isap:317472408	0.456487
etched	isap:267599736	0.396591

Narrower concepts

label	provenance	confidence
anisotropic etching	isap:429460407	0.577100