About: dry etch process

Premodifier: dry etch
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence
suitable etch process	isap:433846094	0.833498

Narrower concepts

label	provenance	confidence
plasma etch	isap:8640881	0.777591
reactive ion etching	isap:438669753	0.592113
plasma	isap:447768045	0.475488