Premodifier: plasmaHead noun: etch
Same concepts |
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http://dbpedia.org/resource/Plasma_etching |
Broader concepts
label | provenance | confidence |
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dry etch process | isap:8640881 | 0.777591 |
etching | isap:7186453 | 0.483079 |
Narrower concepts
label | provenance | confidence |
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