Premodifier: dry
Head noun: etch
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| suitable etching process | isap:8640877 | 0.792503 |
| suitable technique | isap:285959768 | 0.676902 |
| process | isap:8640876 | 0.586380 |
| anisotropic etch | isap:168689388 | 0.516910 |
| isotropic etch | isap:168689389 | 0.509719 |
| etch | isap:168689405 | 0.388464 |
| means | isap:86891871 | 0.257687 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| reactive ion etching | isap:77427236 | 0.456743 |
| plasma | isap:489045761 | 0.278744 |
| etch | isap:168689384 | 0.219953 |