Premodifier: anisotropicHead noun: etch
| Same concepts | 
|---|
Broader concepts
| label | provenance | confidence | 
|---|---|---|
| etch | isap:168689382 | 0.476850 | 
| process | isap:8640880 | 0.435553 | 
Narrower concepts
| label | provenance | confidence | 
|---|---|---|
| reactive ion etching | isap:77427235 | 0.666227 | 
| dry etch | isap:168689388 | 0.516910 | 
| etch | isap:168689373 | 0.426634 | 
| rie | isap:248518771 | 0.371244 | 
| koh | isap:251648874 | 0.297331 |