Premodifier: anisotropicHead noun: etching
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| technique | isap:318270273 | 0.821972 |
| photolithographic technique | isap:318270321 | 0.741520 |
| reactive ion etching | isap:429460407 | 0.577100 |
| art | isap:509896280 | 0.392653 |
| step | isap:76529250 | 0.389164 |
| process | isap:438669791 | 0.350769 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| reactive ion etch rie | isap:233957234 | 0.634615 |
| rie | isap:233996196 | 0.321853 |
| etching | isap:429460398 | 0.255347 |