About: reactive ion etch rie

Premodifier: reactive
Head noun: ion
Postmodifier: etch rie

Same concepts

Broader concepts

label	provenance	confidence
process	isap:235674162	0.881179
dry etching	isap:233957238	0.856579
conventional technique	isap:261846262	0.837719
several well-known method	isap:212931004	0.830729
technique	isap:261846258	0.727884
anisotropic etching	isap:233957234	0.634615
suitable process	isap:235674163	0.629837
art	isap:280907155	0.621666
dry	isap:280912020	0.598398
example	isap:236426486	0.544856
method	isap:212930996	0.462125
etching	isap:233957239	0.430093

Narrower concepts

label	provenance	confidence