Premodifier: reactive
Head noun: ion
Postmodifier: etch rie
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| process | isap:235674162 | 0.881179 |
| dry etching | isap:233957238 | 0.856579 |
| conventional technique | isap:261846262 | 0.837719 |
| several well-known method | isap:212931004 | 0.830729 |
| technique | isap:261846258 | 0.727884 |
| anisotropic etching | isap:233957234 | 0.634615 |
| suitable process | isap:235674163 | 0.629837 |
| art | isap:280907155 | 0.621666 |
| dry | isap:280912020 | 0.598398 |
| example | isap:236426486 | 0.544856 |
| method | isap:212930996 | 0.462125 |
| etching | isap:233957239 | 0.430093 |
Narrower concepts
| label | provenance | confidence |
|---|