Premodifier: photolithographicHead noun: technique
Same concepts |
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Broader concepts
label | provenance | confidence |
---|---|---|
technique | isap:354175116 | 0.676656 |
micromachining | isap:322856838 | 0.202922 |
Narrower concepts
label | provenance | confidence |
---|---|---|
electron beam lithography | isap:277806350 | 0.757533 |
anisotropic etching | isap:318270321 | 0.741520 |
etching | isap:318270274 | 0.343512 |
uv | isap:97950853 | 0.238227 |