Premodifier: photolithographicHead noun: technique
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| technique | isap:354175116 | 0.676656 |
| micromachining | isap:322856838 | 0.202922 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| electron beam lithography | isap:277806350 | 0.757533 |
| anisotropic etching | isap:318270321 | 0.741520 |
| etching | isap:318270274 | 0.343512 |
| uv | isap:97950853 | 0.238227 |