About: electron beam lithography

Premodifier: electron beam
Head noun: lithography

Same concepts
http://dbpedia.org/resource/Electron-beam_lithography

Broader concepts

label	provenance	confidence
high resolution lithography technique	isap:277806321	0.874670
current nanofabrication technique	isap:277806339	0.808867
standard microfabrication technique	isap:277806324	0.795686
photolithographic technique	isap:277806350	0.757533
other technique	isap:277806337	0.755385
technique	isap:277806312	0.749668
process	isap:138762051	0.701102
variety of method	isap:139430983	0.632284
technology	isap:313332331	0.561417
approach	isap:463670952	0.315653
patterning	isap:312328334	0.215538

Narrower concepts

label	provenance	confidence
pmma	isap:419322428	0.269936