About: rie reactive ion etching

Head noun: rie
Postmodifier: reactive ion etching

Same concepts

Broader concepts

label	provenance	confidence
etching technology	isap:238160917	0.729252
etching	isap:233996199	0.596135
dry etching method	isap:215086909	0.543583
technique	isap:262058833	0.352570

Narrower concepts

label	provenance	confidence