Premodifier: semiconductorHead noun: workpiece
| Same concepts | 
|---|
Broader concepts
| label | provenance | confidence | 
|---|---|---|
| workpiece | isap:352977274 | 0.674413 | 
Narrower concepts
| label | provenance | confidence | 
|---|---|---|
| semiconductor wafer | isap:339165117 | 0.768282 | 
| wafer | isap:339165118 | 0.381243 |